XPS study of ultrathin carbon films prepared by filtered cathodic vacuum arc

e-Journal of Surface Science and Nanotechnology

Volumn 4, Issue , 2006, Pages 129-132

  Yasui, Nobuto ^a   Inaba, Hiroshi ^a   Sasaki, Shinji ^a  

^a HITACHI LTD   (Japan)

Author keywords

Carbon; Ion solid interaction; Photoelectron spectroscopy

Indexed keywords

CATHODES; MAGNETRON SPUTTERING; MICROELECTROMECHANICAL DEVICES; VACUUM APPLICATIONS; X RAY PHOTOELECTRON SPECTROSCOPY;

AMORPHOUS CARBON; CARBON IONS; CATHODIC ARC DISCHARGE; ION-SOLID INTERACTION;

DIAMOND LIKE CARBON FILMS;

EID: 31444433298     PISSN: 13480391     EISSN: 13480391     Source Type: Journal    
DOI: 10.1380/ejssnt.2006.129     Document Type: Conference Paper

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