Ab initio calculations of phosphorus and arsenic clustering parameters for the improvement of process simulation models

Materials Science and Engineering: B

Volumn 154-155, Issue 1-3, 2008, Pages 193-197

  Sahli, Beat ^a   Vollenweider, Kilian ^a   Zographos, Nikolas ^b   Zechner, Christoph ^b  

^a ETH ZURICH   (Switzerland)

^b SYNOPSYS SWITZERLAND LLC   (Switzerland)

Author keywords

Arsenic; Clusters; Phosphorus; Silicon

Indexed keywords

ARSENIC; BINDING ENERGY; CALCULATIONS; CLUSTER ANALYSIS; DEFECTS; PHOSPHORUS;

'CURRENT; AB INITIO CALCULATIONS; AB INITIO SIMULATIONS; ACTIVATION MODELS; CLUSTER; CLUSTERINGS; DIFFUSION MODEL; PROCESS SIMULATION MODEL; SPECIFIC DEFECTS; STATE OF THE ART;

SILICON;

EID: 56949101750     PISSN: 09215107     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mseb.2008.09.047     Document Type: Article

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