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Volumn 49, Issue 11, 2002, Pages 2031-2035
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Anomalous phosphorous diffusion
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Author keywords
Diffusion; High concentration; Ion implantation; Phosphorous
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Indexed keywords
ANNEALING;
DOPING (ADDITIVES);
ION IMPLANTATION;
PHOSPHORUS;
HIGH-TEMPERATURE ANNEALING;
DIFFUSION;
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EID: 0036867815
PISSN: 00189383
EISSN: None
Source Type: Journal
DOI: 10.1109/TED.2002.804708 Document Type: Article |
Times cited : (6)
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References (4)
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