Simple versatile shearing interferometer suitable for measurements on a microscopic scale

Optics and Lasers in Engineering

Volumn 47, Issue 2, 2009, Pages 271-273

  Mihaylova, Emilia ^a   Toal, Vincent ^a  

^a DUBLIN INSTITUTE OF TECHNOLOGY   (Ireland)

Author keywords

ESPSI; MEMS; Microcomponents; Microscopy; Shearing interferometry

Indexed keywords

APPLICATIONS; CAMERAS; CHARGE COUPLED DEVICES; COMPOSITE MICROMECHANICS; ELECTROMECHANICAL DEVICES; GLASS; INDUSTRIAL APPLICATIONS; INTERFEROMETERS; INTERFEROMETRY; MEMS; MICROELECTROMECHANICAL DEVICES; OPTICAL INSTRUMENTS; REAL TIME SYSTEMS; REFLECTION; SHEARING MACHINES;

CHARACTERISATION; CONVENTIONAL TESTING; ELECTROMECHANICAL SYSTEMS; ELECTRONIC SPECKLES; ESPSI; FIELD OF VIEWS; FUTURE APPLICATIONS; GLASS PLATES; HIGH RESOLUTIONS; INSPECTION TECHNIQUES; INTERFEROMETRIC SYSTEMS; MICROCOMPONENTS; MICROSCOPE OBJECTIVES; MICROSCOPIC MEASUREMENTS; MICROSCOPIC SCALES; MICROSCOPY; NON CONTACTS; OPTICAL METROLOGIES; OPTICAL TECHNIQUES; PHASE SHIFTING; REFLECTION COEFFICIENTS; REFLECTIVE GLASSES; SHEARING INTERFEROMETERS; SHEARING INTERFEROMETRY; SIMPLE SHEARINGS; WORKING DISTANCES;

SHEARING;

EID: 56949094269     PISSN: 01438166     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.optlaseng.2008.05.003     Document Type: Article

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