Simultaneous reflectivity, ellipsometry and spectrometry measurements in submicron structures for liquid sensing

Sensor Letters

Volumn 6, Issue 4, 2008, Pages 564-569

  Holgado, M ^a   Casquel, R ^a   Molpeceres, C ^a   Morales, M ^a   Ocana J L ^a  

^a UNIVERSIDAD POLITÉCNICA DE MADRID   (Spain)

Author keywords

Bioapplications; Ellipsometry; Optical sensing system; Reflectivity; Spectrometry

Indexed keywords

BIOSENSORS; ELLIPSOMETRY; INTERFEROMETERS; INTERFEROMETRY; LIGHT REFRACTION; OPTICAL PROPERTIES; OPTICAL SYSTEMS; ORGANIC POLYMERS; PHASE SHIFT; POLARIZATION; REFRACTIVE INDEX; REFRACTOMETERS; SENSORS; SPECTROMETERS; SPECTROMETRY; SURFACE PLASMON RESONANCE; THICKNESS MEASUREMENT; WAVEGUIDES;

ANALYTE; ANGLE OF INCIDENCES; BIOAPPLICATIONS; CURRENT STATES; DETECTION LIMITS; DRUG DEVELOPMENTS; EFFECTIVE REFRACTIVE INDICES; ENVIRONMENTAL APPLICATIONS; EXTERNAL-; GRATING COUPLERS; INTERFERENCE PATTERNS; LABEL-FREE BIOSENSORS; LINEARLY POLARIZED; LIQUID SENSING; NANO STRUCTURES; OPTICAL COUPLINGS; OPTICAL SENSING SYSTEM; OPTICAL STRUCTURES; OPTICAL TECHNIQUES; OPTICAL-; PHOTONIC STRUCTURES; POLARIZATION DIRECTIONS; REFLECTIVITY; REFLECTIVITY PROFILES; SCALE INTEGRATIONS; SIMULTANEOUS USES; SIO2/SI WAFERS; SPECTROMETRY MEASUREMENTS; SUBMICRON STRUCTURES; TRIANGULAR LATTICES; WAVEGUIDE SURFACES;

REFLECTION;

EID: 56849133057     PISSN: 1546198X     EISSN: None     Source Type: Journal    
DOI: 10.1166/sl.2008.430     Document Type: Conference Paper

References (25)

1. M. Shinn and W. M. Robertson, Sensors and Actuators B, Chemical 105, 360 (2005).
2. W.-C. Kuo and C. Chou, Opt. Lett. 28, 1329 (2003).
3. J. Homola, S. Yee, and G. Gauglitz, Sensors and Actuators B, Chemical 54, 3 (1999).
4. B. J. Luff, J. S. Wilkinson, J. Piehler, U. Hollenbach, J. Ingenhoff, and N. Fabricius, Journal of Lightwave Technology 16, 583 (1998).
5. F. Prieto, B. Sepúlveda, A. Calle, A. Llobera, C. Domínguez, A. Abad, A. Montoya, and L. TVL Lechuga, Journal of Nanotechnology 14, 907 (2003).
6. D. H. Luo, R. A. Levy, Y. F. Hor, J. F. Federici, and R. M. Pafchek, Sensors and Actuators B, Chemical 92, 121 (2003).
7. B. J. Luff, R. D. Harris, J. S. Wilkinson, R. Wilson, and D. J. Schiffrin, Opt. Lett. 21, 618 (1996).
8. G. H. Cross, A. A. Reeves, S. Brand, J. F. Popplewell, L. L. Peel, M. J. Swann, and N. J. Freeman, Biosens. Bioelectron. 19, 383 (2003).
9. A. Ymeti, J. S. Kanger, J. Greve, P. V. Lambeck, R. Wijn, and R. G. Heideman, Appl. Opt. 42, 5649 (2003).
10. M. Nellen, K. Tiefenthaler, and W. Lukosz, Sensors and Actuators 15, 285 (1988).
11. S. Campopiano, R. Bernini, L. Zeni, and P. M. Sarro, Opt. Lett. 29, 1894 (2004).
12. E. Chow, A. Grot, L. W. M. Mirkarimi, M, Sigalas, and G. Girolami, Opt. Lett. 29, 1093 (2004).
13. V. S.-Y. Lin, K. Motesharei, K.-P. S. Dancil, M. J. Sailor, and M. R. Ghadir, Science 278, 840 (1997).
14. R. M. Ostroff, D. Maul, G. R. Bogart, S. Yang, J. Christian, D. Hopkins, D. Clark, B. Trotter, and G. Moddel, Clin. Chem. 44, 2031 (1998).
15. H. Arwin, Thin Solid Films 377-378, 48 (2000).
16. D. Van Thourhout, W. Bogaerts, P. Dumon, G. Roelkens, J. Van Campenhout, and R. Baets, Proceedings from the conference Integrated Photonics Research and Application, Nanophotonics, OSA Topical Meetings (2006).
17. A. Rosencwaig, J. Opsal, D. L. Willenborg, S. M. Kelso, and J. T. Fanton, Appl. Phys. Lett. 60, 1301 (1992).
18. J. T. Fanton, J. Sal, D. L. Willenborg, S. M. Kelso, and A. Rosencwaig, J. Appl. Phys. 73, 7036 (1993).
19. J. M. Leng, J. Chen, J. Fanton, M. Senko, K. Ritz, and J. Opsal, Thin Solid Films 313-314, 308 (1998).
20. R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light, North-Holland, Amsterdam (1977), p. 274.
21. M. J. Weber, Handbook of Optical Materials, Boca Raton, FL, USA (2003), p. 399.
22. R. Scarmozzino, A. Gopinath, R. Pregla, and S. Helfert, J. Selected Topics in Quantum Electronics 6, 150 (2000).
23. E. Hecht and A. Zajac, Optics, Addisson-Westley Publishing Company, Wilmington, Delaware, USA (1974), p. 78.
24. H. G. Tompkins and E. A. Irene, Handbook of Ellipsometry, William Andrew Inc., Norwich, NY, USA (2005).
25. R. Ince and R. Narayanaswamy, Anal. Chim. Acta 569, 1 (2006).