Full-chip CMP simulation system

ICPT 2007 - International Conference on Planarization/CMP Technology, Proceedings

Volumn , Issue , 2007, Pages 187-194

  Fukuda, Daisuke ^a   Shibuya, Toshiyuki ^a   Idani, Naoki ^a   Karasawa, Toshiyuki ^a  

^a FUJITSU LABORATORIES LTD   (Japan)

Author keywords

CMP; DFM; DFY; ECP; Planarization; simulation

Indexed keywords

DATA MINING; ERRORS; INFORMATION RETRIEVAL; TOPOGRAPHY;

COMMERCIAL TOOLS; DATA EXTRACTION; DUMMY FILL INSERTION; DUMMY FILLINGS; EXTRACT INFORMATIONS; MODEL ACCURACY; PROCESS PARAMETER VARIATIONS; SIMULATION SYSTEMS;

DATA REDUCTION;

EID: 56749124307     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (9)

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