Direct patterning of polystyrene-polymethyl methacrylate copolymer by means of laser interference lithography using UV laser irradiation

Polymer Engineering and Science

Volumn 48, Issue 12, 2008, Pages 2367-2372

  Lasagni, A F ^a,b   Acevedo, D F ^a,c   Barbero, C A ^c   Mucklich F ^a  

^a SAARLAND UNIVERSITY   (Germany)

^b GEORGIA INSTITUTE OF TECHNOLOGY   (United States)

^c DEPARTAMENTO DE QUÍMICA   (Argentina)

Author keywords

[No Author keywords available]

Indexed keywords

OPTICAL PROPERTIES; PERIODIC STRUCTURES; POLYMETHYL METHACRYLATES; STYRENE; SUBSTRATES;

DIRECT-PATTERNING; FUNCTIONAL SURFACES; FUNCTIONALIZED SURFACES; INTERFERENCE LITHOGRAPHY; LASER INTERFERENCE; MATERIAL SCIENCE; METHACRYLATE COPOLYMERS; MICRO/NANO; POLYMERIC SUBSTRATE; UV-LASER IRRADIATION;

FABRICATION;

EID: 56749106713     PISSN: 00323888     EISSN: 15482634     Source Type: Journal    
DOI: 10.1002/pen.21189     Document Type: Article

References (20)

1. P. Li, U. Bakowsky, F. Yu, C. Loebach, F. Mücklich, and C.L. Lehr, IEEE T. Nanobiosci., 2, 138 (2003).
2. A.S.G. Curtis and P. Clark, Crit. Rev. Biocompact., 5, 343 (1990).
3. S.W. Lee, J.W. Hong, M.Y. Wye, J.H. Kim, H.J. Kang, and Y.S. Lee, Nucl. Instrum. Meth. Phys. Res. B, 219-220, 963 (2004).
4. R. Srinivasan and W.J. Leigh, J. Am. Chem. Soc., 104, 6784 (1982).
5. G.B. Blanchet and C.R. Fincher Jr., Appl. Phys. Lett. 65, 1311 (1994).
6. Y. Xia and G.M. Whitesides, Angew. Chem. Int. Ed , 37, 550 (1998).
7. M.K. Kelly, J. Rogg, C. Nebel, M. Stutzmann, and Sz. Kátai, Phys. Stat. Sol. A, 166, 651 (1998).
8. A. Lasagni, C. Holzapfel, and F. Mücklich, Adv. Eng. Mater., 7, 487 (2005).
9. F. Mücklich A. Lasagni, and C. Daniel, Intermetallics, 13, 437 (2005).
10. A. Lasagni, D. Acevedo, C. Barbero, and F. Mücklich, Adv. Eng. Mater., 1-2, 99 (2007).
11. F. Mücklich A. Lasagni, and C. Daniel, Zeitschrift für Metallkunde, 97, 1337 (2006).
12. F. Beinhorn , J. Ihlemann, K. Luther, and J. Tree, Appl. Phys. A, 68, 709(1999).
13. E. Sutcliffe and R. Srinivasan, J. Appl. Phys., 60, 3315 (1986).
14. T. Efthimiopoulos, Ch. Kiagias, G. Heliotis, and E. Helidonis, Can. J. Phys., 78, 509 (2000).
15. D. Krajnovich, J. Appl. Phys., 82, 427 (1997)
16. K.E. Sehmalenberga, H.M. Buettnerb, and K.E. Uhricha, Biomaterials, 25, 1851 (2004).
17. D. Krajnovich, J. Phys. Chem. A, 101, 2033 (1997).
18. R.C. Weast, Handbook of Chemistry and Physics, 53rd ed., CRC Press, New York (1972).
19. R. Srinivasan, B. Braren, K.G. Casey, and M. Yeh, J. Appl. Phys., 67, 1604 (1990).
20. R. Estler and N. Nogar, Appl. Phys. Lett., 49, 1175 (1986).