Compositional and structural evolution of the titanium dioxide formation by thermal oxidation

Chinese Physics B

Volumn 17, Issue 8, 2008, Pages 3003-3007

  Su, Wei Feng ^a   Gnaser, Hubert ^b   Fan, Yong Liang ^a   Jiang, Zui Min ^a   Le, Yong Kang ^a,b  

^a FUDAN UNIVERSITY   (China)

^b University of Koblenz Landau   (Germany)

Author keywords

Compositional and structural evolution; Thermal oxidation; Titanium oxide

Indexed keywords

ANNEALING; AUGER ELECTRON SPECTROSCOPY; CHEMICAL OXYGEN DEMAND; CRYSTAL ATOMIC STRUCTURE; FORMING; HIGH PERFORMANCE LIQUID CHROMATOGRAPHY; MASS SPECTROMETRY; OXIDATION; OXIDE MINERALS; OXIDES; OXYGEN; REAL TIME SYSTEMS; SECONDARY ION MASS SPECTROMETRY; TITANIUM; TITANIUM DIOXIDE; TITANIUM OXIDES; X RAY ANALYSIS;

ATOMIC FORCES; COMPOSITIONAL AND STRUCTURAL EVOLUTION; DC MAGNETRONS; MORPHOLOGICAL CHARACTERIZATIONS; OXIDATION PROCESSES; OXIDATION STAGES; OXIDIZED FILMS; SECONDARY IONS; SPUTTER PROFILING; STRUCTURAL EVOLUTIONS; THERMAL OXIDATION; THERMAL OXIDATIONS; TITANIUM FILMS; TITANIUM OXIDE FILMS; UNDERLYING MECHANISMS; X-RAY DIFFRACTIONS;

OXIDE FILMS;

EID: 56349144809     PISSN: 16741056     EISSN: None     Source Type: Journal    
DOI: 10.1088/1674-1056/17/8/040     Document Type: Article

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