Strong composition-dependent variation of MCs + calibration factors in TiO x and GeO x (x ≤ 2) films

Applied Surface Science

Volumn 252, Issue 19, 2006, Pages 7054-7057

  Gnaser, Hubert ^a   Le, Yongkang ^b   Su, Weifeng ^b  

^a University of Koblenz Landau   (Germany)

^b FUDAN UNIVERSITY   (China)

Author keywords

Calibration factors; GeO x; MCs + secondary ions; TiO x

Indexed keywords

CALIBRATION; GERMANIUM COMPOUNDS; ION BOMBARDMENT; LIGHT EMISSION; THIN FILMS;

CALIBRATION FACTORS; GEOX; MC+ SECONDARY IONS; TIOX;

IONS;

EID: 33747151365     PISSN: 01694332     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.apsusc.2006.02.188     Document Type: Article

References (19)

1. Ray M.A., Baker J.E., Loxton C.M., and Greene J.E. J. Vac. Sci. Technol. A 6 (1988) 44
2. Gao Y. J. Appl. Phys. 64 (1988) 3760
3. Magee C.W., Harrington W.L., and Botnick E.M. Int. J. Mass Spectrom. Ion Proc. 103 (1990) 45
4. Gnaser H., and Oechsner H. Fresenius' J. Anal. Chem. 341 (1991) 54
5. Gnaser H., and Oechsner H. Surf. Interface Anal. 17 (1991) 646
6. Wittmaack K. Nucl. Instrum. Methods B 64 (1992) 621
7. Gnaser H. J. Vac. Sci. Technol. A 12 (1994) 452
8. Gnaser H. In: Pandalai S.G. (Ed). Recent Research Developments in Vacuum Science & Technology vol. 4 (2003), Transworld Research Network, Trivandrum 111
9. Homma Y., Higashi Y., Maruo T., Maekawa C., and Ochiai S. In: Benninghoven A., Nihei Y., Shimizu R., and Werner H.W. (Eds). Secondary Ion Mass Spectrometry SIMS IX (1994), Wiley, Chichester 398
10. Kataoka Y., and Toda Y. In: Benninghoven A., Nihei Y., Shimizu R., and Werner H.W. (Eds). Secondary Ion Mass Spectrometry SIMS IX (1994), Wiley, Chichester 402
11. Wittmaack K. In: Benninghoven A., Hagenhoff B., and Werner H.W. (Eds). Secondary Ion Mass Spectrometry SIMS X (1997), Wiley, Chichester 39
12. Bieck W., Mootz T., and Saldi F. In: Gillen G., Lareau R., Bennett J., and Stevie F. (Eds). Secondary Ion Mass Spectrometry SIMS XI (1998), Wiley, Chichester 907
13. Willich P., and Bethke R. In: Gillen G., Lareau R., Bennett J., and Stevie F. (Eds). Secondary Ion Mass Spectrometry SIMS XI (1998), Wiley, Chichester 991
14. Willich P., and Steinberg C. Appl. Surf. Sci. 179 (2001) 263
15. Kataoka Y., Shigeno M., and Wittmaack K. J. Vac. Sci. Technol. B 20 (2002) 441
16. Gnaser H., Huber B., and Ziegler C. In: Nalwa H.S. (Ed). Encyclopedia of Nanoscience and Nanotechnology vol. 6 (2004), American Scientific Publishers, Stevenson Ranch 505
17. Skubal L.R., Meshkov N.K., and Vogt M.C. J. Photochem. Photobiol. A 148 (2002) 103
18. Grätzel M. Nature 414 (2001) 338
19. Migeon H.N., Le Pipec C., and Le Goux J.J. In: Benninghoven A., Colton R.J., Simons D.S., and Werner H.W. (Eds). Secondary Ion Mass Spectrometry SIMS V (1986), Springer, Berlin 155