Shadowing growth of biaxially textured nanostructured films

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 7041, Issue , 2008, Pages

  Lu, Toh Ming ^a   Tang, Fu ^a   Wang, Gwo Ching ^a  

^a RENSSELAER POLYTECHNIC INSTITUTE   (United States)

Author keywords

Biaxial; Electron diffraction; Nanocrystalline; Oblique angle deposition; Polycrystalline; Shadowing growth; Surface pole figure; Texture

Indexed keywords

CRYSTALLOGRAPHY; DIFFRACTION; ELECTRON DIFFRACTION; NANOSTRUCTURED MATERIALS; POLES; REFLECTION HIGH ENERGY ELECTRON DIFFRACTION; SINGLE CRYSTALS; TEXTURES; THICK FILMS; THIN FILMS;

BIAXIAL; NANOCRYSTALLINE; OBLIQUE ANGLE DEPOSITION; POLYCRYSTALLINE; SHADOWING GROWTH;

FILM GROWTH;

EID: 56249114485     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.794217     Document Type: Conference Paper

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