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Volumn 42, Issue 2, 2009, Pages 197-205

Impact dynamics of rough and surface protected MEMS gears

Author keywords

Adhesion; Impact dynamics; MEMS; Nanoscopic contact mechanics; SAM

Indexed keywords

ACOUSTIC MICROSCOPES; ADHESION; AMPLITUDE MODULATION; COMPOSITE MICROMECHANICS; DENTISTRY; DYNAMICS; ELECTROMECHANICAL DEVICES; HIERARCHICAL SYSTEMS; MECHANICS; MEMS; MICROELECTROMECHANICAL DEVICES; MISSILE BASES;

EID: 56249106484     PISSN: 0301679X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.triboint.2008.05.019     Document Type: Article
Times cited : (28)

References (24)
  • 1
    • 56249119640 scopus 로고    scopus 로고
    • Tanner DM, Smith NF, Irwin LW, Eaton WP, Helgesen KS, Clement JJ, et al. MEMS reliability: infrastructure, test structures, experiments, and failure modes. Sandia report, SAND2000-0091, 2000.
    • Tanner DM, Smith NF, Irwin LW, Eaton WP, Helgesen KS, Clement JJ, et al. MEMS reliability: infrastructure, test structures, experiments, and failure modes. Sandia report, SAND2000-0091, 2000.
  • 2
    • 33745124698 scopus 로고    scopus 로고
    • Microfabricated torsional actuators using self-aligned plastic deformation of silicon
    • Kim J.B., Choo H., Lin L., and Muller R.S. Microfabricated torsional actuators using self-aligned plastic deformation of silicon. IEEE/ASME J Microelectromech Syst 15 3 (2006) 553-562
    • (2006) IEEE/ASME J Microelectromech Syst , vol.15 , Issue.3 , pp. 553-562
    • Kim, J.B.1    Choo, H.2    Lin, L.3    Muller, R.S.4
  • 3
    • 33847301594 scopus 로고    scopus 로고
    • Design and characterization of microfabricated piezoresistive floating element-based shear stress sensors
    • Barlian A.A., Park S.-J., Mukundan V., and Pruitta B.L. Design and characterization of microfabricated piezoresistive floating element-based shear stress sensors. Sens Actuators A: Phys 134 1 (2007) 77-87
    • (2007) Sens Actuators A: Phys , vol.134 , Issue.1 , pp. 77-87
    • Barlian, A.A.1    Park, S.-J.2    Mukundan, V.3    Pruitta, B.L.4
  • 4
    • 84990328168 scopus 로고    scopus 로고
    • Teodorescu M, Rahnejat H. Dry and wet nano-scale impact dynamics of rough surfaces with or without a self-assembled mono-layer. In: Proceedings of the Institution of Mechanical Engineers (IMechE); J Nanoeng Nanosyst-Part N 2007;221(2):49-58.
    • Teodorescu M, Rahnejat H. Dry and wet nano-scale impact dynamics of rough surfaces with or without a self-assembled mono-layer. In: Proceedings of the Institution of Mechanical Engineers (IMechE); J Nanoeng Nanosyst-Part N 2007;221(2):49-58.
  • 5
    • 81155154353 scopus 로고    scopus 로고
    • Teodorescu M, Theodossiades S, Rahnejat H. Nano-scale impact characteristics of rough surfaces in humid atmosphere with full or partial SAM protection. In: Proceedings of the international conference on micro- and nanosystems (MNS), IDETC2008, New York City, New York, USA, August 2008.
    • Teodorescu M, Theodossiades S, Rahnejat H. Nano-scale impact characteristics of rough surfaces in humid atmosphere with full or partial SAM protection. In: Proceedings of the international conference on micro- and nanosystems (MNS), IDETC2008, New York City, New York, USA, August 2008.
  • 6
    • 0033742679 scopus 로고    scopus 로고
    • Self-assembled monolayers as anti-stiction coatings for MEMS: characteristics and recent developments
    • Maboudian R., Ashurst W.R., and Carraro C. Self-assembled monolayers as anti-stiction coatings for MEMS: characteristics and recent developments. Sens Actuators 82 (2000) 219-223
    • (2000) Sens Actuators , vol.82 , pp. 219-223
    • Maboudian, R.1    Ashurst, W.R.2    Carraro, C.3
  • 7
    • 56249125369 scopus 로고    scopus 로고
    • Reedy Jr. ED, Starr MJ, Jones RE, Flater EE, Carpick RW. Contact modeling of SAM-coated polysilicon asperities. In: Proceedings of the 28th annual meeting of the adhesion society meeting, Mobile AL, February 2005.
    • Reedy Jr. ED, Starr MJ, Jones RE, Flater EE, Carpick RW. Contact modeling of SAM-coated polysilicon asperities. In: Proceedings of the 28th annual meeting of the adhesion society meeting, Mobile AL, February 2005.
  • 11
    • 0023981561 scopus 로고
    • Mathematical models used in gear dynamics-a review
    • Ozguven H.N., and Houser D.R. Mathematical models used in gear dynamics-a review. J Sound Vib 121 (1988) 383-411
    • (1988) J Sound Vib , vol.121 , pp. 383-411
    • Ozguven, H.N.1    Houser, D.R.2
  • 12
    • 0035859235 scopus 로고    scopus 로고
    • On geared rotordynamic systems with oil journal bearings
    • Theodossiades S., and Natsiavas S. On geared rotordynamic systems with oil journal bearings. J Sound Vib 243 4 (2001) 721-745
    • (2001) J Sound Vib , vol.243 , Issue.4 , pp. 721-745
    • Theodossiades, S.1    Natsiavas, S.2
  • 13
    • 0015248524 scopus 로고
    • The contact of two nominally flat rough surfaces
    • Greenwoon J., and Tripp J.H. The contact of two nominally flat rough surfaces. Proc Inst Mech Eng 185 48/71 (1970/1971) 625-633
    • (1970) Proc Inst Mech Eng , vol.185 , Issue.48-71 , pp. 625-633
    • Greenwoon, J.1    Tripp, J.H.2
  • 15
    • 0000469962 scopus 로고
    • Surface energy and the contact of elastic solids
    • Johnson K.L., Kendall K., and Roberts A.D. Surface energy and the contact of elastic solids. Proc R Soc, Ser A 324 1558 (1971) 301-313
    • (1971) Proc R Soc, Ser A , vol.324 , Issue.1558 , pp. 301-313
    • Johnson, K.L.1    Kendall, K.2    Roberts, A.D.3
  • 16
    • 0035819830 scopus 로고    scopus 로고
    • Adhesion between a spherical indenter and an elastic solid with a compliant elastic coating
    • Johnson K.L., and Sridhar I. Adhesion between a spherical indenter and an elastic solid with a compliant elastic coating. J Phys D: Appl Phys 34 (2001) 683-689
    • (2001) J Phys D: Appl Phys , vol.34 , pp. 683-689
    • Johnson, K.L.1    Sridhar, I.2
  • 17
    • 0001229556 scopus 로고
    • The effect of surface roughness on the adhesion of elastic solids
    • Fuller K.N.G., and Tabor D. The effect of surface roughness on the adhesion of elastic solids. Proc R Soc, Ser A 345 1642 (1975) 327-342
    • (1975) Proc R Soc, Ser A , vol.345 , Issue.1642 , pp. 327-342
    • Fuller, K.N.G.1    Tabor, D.2
  • 19
    • 33751360590 scopus 로고
    • Adhesion of spheres: the JKR-DMT transition using a Dugdale model
    • Maugis D. Adhesion of spheres: the JKR-DMT transition using a Dugdale model. J Colloid Interface Sci 150 (1992) 243-269
    • (1992) J Colloid Interface Sci , vol.150 , pp. 243-269
    • Maugis, D.1
  • 20
    • 0030695908 scopus 로고    scopus 로고
    • An adhesion map for the contact of elastic spheres
    • Johnson K.L., and Greenwood J.A. An adhesion map for the contact of elastic spheres. J Colloids Interface Sci 192 (1997) 326-333
    • (1997) J Colloids Interface Sci , vol.192 , pp. 326-333
    • Johnson, K.L.1    Greenwood, J.A.2
  • 21
    • 33646733743 scopus 로고
    • Surface forces and surface interactions
    • Tabor D. Surface forces and surface interactions. J Colloids Interface Sci 58 1 (1977) 2-13
    • (1977) J Colloids Interface Sci , vol.58 , Issue.1 , pp. 2-13
    • Tabor, D.1
  • 22
    • 0347577312 scopus 로고    scopus 로고
    • Adhesion and friction between a smooth elastic spherical asperity and a plane surface
    • Johnson K.L. Adhesion and friction between a smooth elastic spherical asperity and a plane surface. Proc R Soc Lond A 453 (1997) 163-179
    • (1997) Proc R Soc Lond A , vol.453 , pp. 163-179
    • Johnson, K.L.1
  • 23
  • 24
    • 56249105925 scopus 로고    scopus 로고
    • Starr MJ, Sumali H, Redmond JM, Flater EE, Carpick RW. Analysis of contact forces using AFM data of polycrystalline silicon. In: Proceedings of the SEM X international congress and exposition on experimental and applied mechanics, Costa Mesa, CA, July 2004.
    • Starr MJ, Sumali H, Redmond JM, Flater EE, Carpick RW. Analysis of contact forces using AFM data of polycrystalline silicon. In: Proceedings of the SEM X international congress and exposition on experimental and applied mechanics, Costa Mesa, CA, July 2004.


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.