Rotational flexures deliver high precision

Laser Focus World

Volumn 41, Issue 4, 2005, Pages 89-92

  O'Brien, Bill ^a  

^a Mad City Labs Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

MULTILAYER PIEZOACTUATORS; NANORADIAN RESOLUTION; POSITION SENSORS; ROTATIONAL FLEXURE HINGES;

ACTUATORS; CAPACITANCE; ELASTIC MODULI; ELECTRIC DISCHARGE MACHINING; EQUATIONS OF MOTION; HINGES; MIRRORS; NATURAL FREQUENCIES; PRISMS; SENSORS; STICTION; STIFFNESS; WEAR RESISTANCE;

NANOTECHNOLOGY;

EID: 18344373686     PISSN: 10438092     EISSN: None     Source Type: Trade Journal    
DOI: None     Document Type: Review

References (2)

1. B. Andersen et al., Proc. ACTUATOR 2004, 9th Int'l. Conf. on New Actuators and 3rd Int'l. Exhibit, on Smart Actuator and Drive Systems, Bremen, Germany, 64 (June 2004).
2. S. T. Smith and D. G. Chetwynd, Foundations of Ultraprecision Mechanism Design 2, Gordon and Breach Science Publishers, Amsterdam, the Netherlands (1998).