Linear standard for SEM-AFM microelectronics dimensional metrology in the range 0.01-100 μm

Mikroelektronika

Volumn 31, Issue 4, 2002, Pages 243-263

  Volk, Ch P ^a   Gornev, Yu A ^a   Novikov, Yu A ^a   Ozerin, Yu V ^a   Plotnikov, Yu I ^a   Prokhorov, A M ^a   Rakov, A V ^a  

^a NONE

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EID: 0036420617     PISSN: 05441269     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

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