Atomic force microscopy for metrology of micro- and nanostructures

Russian Microelectronics

Volumn 26, Issue 3, 1997, Pages 137-148

  Bukharaev, A A ^a   Berdunov, N V ^a   Ovchinnikov, D V ^a   Salikhov, K M ^a  

^a ZAVOISKY PHYSICAL TECHNICAL INSTITUTE   (Russian Federation)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 3342918592     PISSN: 10637397     EISSN: None     Source Type: Journal    
DOI: None     Document Type: Article

References (15)

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