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Materials Research Society Symposium Proceedings

Volumn 1069, Issue , 2008, Pages 175-180

High-frequency electron paramagnetic resonance study of the as deposited and annealed carbon-rich hydrogenated amorphous silicon-carbon films

(8) Vasin, A V a Kalabukhova, E N a Lukin, S N a Savchenko, D V a Lysenko, V S a Nazarov, A N a Rusavsky, A V a Koshka, Y b

a INSTITUTE OF SEMICONDUCTOR PHYSICS (Ukraine)

b MISSISSIPPI STATE UNIVERSITY (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ANNEALING; CARBON FILMS; DANGLING BONDS; DEFECTS; HYDROGENATION; PARAMAGNETIC RESONANCE; PARAMAGNETISM; SILICON ALLOYS; SILICON CARBIDE; TEMPERATURE;

AMORPHOUS HYDROGENATED CARBON; DEMAGNETIZING FIELD; GRAPHITE-LIKE CARBONS; PARAMAGNETIC CENTERS; PARAMAGNETIC DEFECTS; RESONANCE POSITION; SILICON CARBON ALLOYS; THERMAL-ANNEALING;

AMORPHOUS SILICON;

EID: 55849104808 PISSN: 02729172 EISSN: None Source Type: Conference Proceeding
DOI: 10.1557/proc-1069-d07-11 Document Type: Conference Paper

Times cited : (2)

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