Filtered cathodic arc deposited diamond like carbon: Electron Spin Resonance (ESR) and Raman spectroscopy

Materials Research Society Symposium - Proceedings

Volumn 593, Issue , 2000, Pages 249-254

  Druz, B ^a   Zaritskiy, I ^a   Yevtukhov, Y ^a   Konchits, A ^b   Valakh, M ^b   Kolesnik, S ^b   Shanina, B ^b   Visotski, V ^b  

^a VEECO INSTRUMENTS INC   (United States)

^b INSTITUTE OF SEMICONDUCTOR PHYSICS   (Ukraine)

Author keywords

[No Author keywords available]

Indexed keywords

CARBON; DEFECTS; DEPOSITION; ELECTRON ENERGY LEVELS; ELECTRON SPIN RESONANCE SPECTROSCOPY; ENERGY GAP; ION BEAMS; RAMAN SPECTROSCOPY; SILICON; STRESSES; THICK FILMS; VACUUM APPLICATIONS;

DIAMOND LIKE CARBON FILMS; FILTERED CATHODIC VACUUM ARC PROCESS; ION BEAM DEPOSITION; PARAMAGNETIC DEFECTS;

DIAMOND FILMS;

EID: 0033725393     PISSN: 02729172     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (8)

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5. F. Giorgis, A. Tagliaferro, M. Fanciulli, in Amorphous Carbon: State of the Art, edited by S.R.P. Silva, J. Robertson, W.I. Milne, G.A.J. Amaratunga (World Scientific Publishing Co., Singapore, 1998) p. 143.
6. A. Abragam, B. Bleaney, Electron Paramagnetic Resonance of Transition Ions, V. 1 (Clarendon Press, Oxford, 1970).
7. A. Konchits, Superhard Materials, No.3, 56 (1998).
8. S. Prawer, K.W. Nugent, in Amorphous Carbon: State of the Art, edited by S.R.P. Silva, J. Robertson, W.I. Milne, G.A.J. Amaratunga (World Scientific Publishing Co., Singapore, 1998) p. 199.