Analysis of read current and write trip voltage variability from a 1-MB SRAM test structure

IEEE Transactions on Semiconductor Manufacturing

Volumn 21, Issue 4, 2008, Pages 534-541

  Fischer, Thomas ^a   Amirante, Ettore ^b   Huber, Peter ^b   Nirschl, Thomas ^b   Olbrich, Alexander ^b   Ostermayr, Martin ^b   Schmitt Landsiedel, Doris ^a  

^a TECHNICAL UNIVERSITY OF MUNICH   (Germany)

^b INFINEON TECHNOLOGIES AG   (Germany)

Author keywords

65 and 90 nm; Low voltage; Measurement structure; Read current; SRAM; Variation; Write trip voltage

Indexed keywords

ELECTRONIC EQUIPMENT TESTING; MONTE CARLO METHODS;

65 AND 90 NM; LOW VOLTAGE; MEASUREMENT STRUCTURE; READ CURRENT; SRAM; VARIATION; WRITE TRIP VOLTAGE;

STATIC RANDOM ACCESS STORAGE;

EID: 55649122323     PISSN: 08946507     EISSN: None     Source Type: Journal    
DOI: 10.1109/TSM.2008.2004329     Document Type: Conference Paper

References (8)

1. T. Mizuno, J. Okamura, and A. Toriumi, "Experimental study of threshold voltage fluctuation due to statistical variation of channel dopant number in MOSFET's," IEEE Trans. Electron Devices, vol. 41, no. 11, pp. 2216-2221, Nov. 1994.
2. A. J. Bhavnagarwala, X. Tang, and J. Meindl, "The impact of intrinsic device fluctuations on CMOS SRAM cell stability," IEEE J. Solid-State Circuits, vol. 36, no. 4, pp. 658-665, Apr. 2001.
3. M. Pelgrom, A. Duinmaijer, and A. Welbers, "Matching properties of MOS transistors," IEEE J. Solid-State Circuits, vol. 24, no. 5, pp. 14.33-1439, Oct. 1989.
4. T. Fischer, E. Amirante, P. Huber, M. Ostermayr, T. Nirschl, C. Otte, J. Einfeld, and D. Schmitt-Landsiedel, "A 1Mbit SRAM test structure to analyze local mismatch beyond 5 sigma variation," in Proc. IEEE Int. Conf. Microelectronic Test Structures, Mar. 2007, pp. 63-66.
5. T. Schafbauer et al., "Integration of high-performance, low-leakage and mixed signal features into a 100 nm CMOS technology," in Proc. IEEE Symp. VLSI Tech., Jun. 2002, pp. 62-63.
6. Z. Luo et al., "High performance and low power transistors integrated in 65 nm bulk CMOS technology," in Proc. IEEE IEDM, Dec. 2004, pp. 661-664.
7. H. W. Lilliefors, "On the Kolmogorov-Smirnov test for normality with mean and variance unknown," J. Amer. Statist. Assoc., vol. 62, pp. 399-402, Jun. 1967.
8. A. K. Bera and M. J. Jarque, "Efficient tests for normality, homoscedasticity and serial independence of regression residuals," Economics Lett., vol. 6, no. 3, pp. 255-259, Jun. 1980.