Piezoelectric aluminum nitride resonator for reference oscillator

2008 IEEE International Frequency Control Symposium, FCS

Volumn , Issue , 2008, Pages 233-236

  Verjus, F ^a   Fougerat, A ^a   Rousseard, J ^a   Le Cornec, F ^a   Loiseau, S ^a   Valbin, L ^b  

^a NXP SEMICONDUCTORS   (France)

^b UNIVERSITÉ PARIS EST   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ALUMINA; ALUMINUM; ALUMINUM COMPOUNDS; LIGHT METALS; NITRIDES; PIEZOELECTRICITY; RESONANCE; RESONATORS; SEMICONDUCTING SILICON COMPOUNDS; SILICON; SILICON WAFERS; THICK FILMS; THIN FILM DEVICES; THIN FILMS;

AL THIN FILMS; ALUMINUM ELECTRODES; ALUMINUM NITRIDES; DC MAGNETRON SPUTTERING; IN PLANES; PIEZOELECTRIC ALUMINUM NITRIDE THIN FILMS; PIEZOELECTRIC RESONATORS; Q FACTORS; REFERENCE OSCILLATORS; RESONANCE FREQUENCIES; THERMAL MEASUREMENTS;

MAGNETRON SPUTTERING;

EID: 55649103198     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/FREQ.2008.4622996     Document Type: Conference Paper

References (5)

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