Measurement methods for the d33 coefficient of PZT thin films on silicon substrates: A comparison of double-beam laser interferometer (DBI) and single-beam laser vibrometer (LDV) techniques

Ferroelectrics

Volumn 351, Issue 1 PART 1, 2007, Pages 122-130

  Pokorny, Marek ^a   Sulc, Miroslav ^a   Herdier, Romain ^b   Remiens, Denis ^b   Dogheche, Elhadj ^b   Jenkins, David ^c  

^a TECHNICAL UNIVERSITY OF LIBEREC   (Czech Republic)

^b IEMNDOAE   (France)

^c UNIVERSITY OF PLYMOUTH   (United Kingdom)

Author keywords

Ferroelectric; MEMS characterisation; Piezoelectric

Indexed keywords

CHARACTERISATION; DOUBLE BEAM INTERFEROMETERS; DOUBLE-BEAM; LASER DOPPLER VIBROMETERS; LASER INTERFEROMETER; LASER VIBROMETERS; MEASUREMENT METHODS; PIEZOELECTRIC COEFFICIENT; PIEZOELECTRIC THIN FILMS; PZT THIN FILM; SAMPLE PREPARATION; SILICON SUBSTRATES; SINGLE-BEAM; SUBSTRATE BENDING;

DIELECTRIC MATERIALS; FERROELECTRICITY; INTERFEROMETERS; LASER DOPPLER VELOCIMETERS; LASER INTERFEROMETRY; MEMS; MICROELECTROMECHANICAL DEVICES; PIEZOELECTRICITY; SUBSTRATES; THIN FILMS;

SEMICONDUCTING SILICON COMPOUNDS;

EID: 55349087978     PISSN: 00150193     EISSN: 15635112     Source Type: Journal    
DOI: 10.1080/00150190701354109     Document Type: Conference Paper

References (10)

1. Chen Chao, Zhihong Wang, Weiguang Zhu, and Ooikiang Tan, Scanning homodyne interferometer for characterization of piezoelectric films and microelectromechanical systems devices. Rev. Sci. Instrum. 76, 063906 (2005).
2. 33 on thin film. Review Scientific Instruments 77(9) (2006).
3. D. Remiens, E. Cattan, C. Soyer, and T. Haccart, Piezoelectric properties of sputtered PZT films: influence of structure, micro structure, film thickness (Zr,Ti) ratio and Nb substitution. Material Science in Semiconductor Processing 92(6), 348 (2002).
4. K. Lefki and G. J. M. Dormans, Measurement of piezoelectric coefficients of ferroelectric thin films. J. Appl. Phys. 76(3), 1764-1767 (1994).
5. A. Khalkis, Ch. Wutchrich, D. V. Taylor, and Setter N, Interferometric measurements of electric field-induced displacements in piezoelectric thin films. Review of Scientific Instruments 67, 1935-1941 (1996).
6. W. Y. Pan and L. E. Cross, A sensitive double beam laser interferometer for studying high-frequency piezoelectric and electrostrictive strain, Review of Scientific Instruments. 60, 2701-2705 (1989).
7. M. Pokorny, Nonlinear piezoelectric characteristics of PZT thin films (Standard measurement methods and PZT films integration to MEMS), PhD thesis, Technical University of Liberec, Czech Republic (2006).
8. A. Barzegar, D. Damjanovic, N. Leadermann, and P. Muralt, Piezoelectric response of thin films determined by charge integration technique: substrate bending effects. Journal of Applied Physics 93, 4756-4760 (2003).
9. P. Gerber, A. Roelofs, O. Lohse, C. Kugeler, S. Tiedke, U. Bottger, and R. Waser, Short-time piezoelectric measurements in ferroelectric thin films using double-beam laser interferometer. Review of Scientific Instruments, 74, 2613-2615 (2002).
10. Ch. Chao, Z. Wang, and W. Zhu, Measurement of longitudinal piezoelectric coefficient of lead zirconate titanate thin/thick films using a novel scanning Mach-Zehnder interferometer. Thin Solid Films. 493, 313-318 (2005).