|
|
Volumn 47, Issue 7 PART 3, 2008, Pages 6181-6185
|
|
Nanometer-scale manipulation and ultrasonic cutting using an atomic force microscope controlled by a haptic device as a human interface
a
|
|
Author keywords
Atomic force microscope; Haptic device; Nanofabrication; Scratching
|
|
Indexed keywords
ABS RESINS;
ATOMIC FORCE MICROSCOPY;
ATOMIC PHYSICS;
ATOMS;
CRYSTAL CUTTING;
CRYSTAL RESONATORS;
MICROSCOPES;
MICROSCOPIC EXAMINATION;
OXIDE MINERALS;
QUARTZ;
RESONANCE;
SPHERES;
SURFACE REACTIONS;
ULTRASONIC CUTTING;
ULTRASONICS;
AFM PROBES;
ATOMIC FORCE MICROSCOPE;
ATOMIC FORCE MICROSCOPES;
BIOLOGICAL SAMPLES;
BIOLOGICAL SCIENCES;
CUTTING PERFORMANCES;
CUTTING SYSTEMS;
EFFECTIVE TOOLS;
HAPTIC DEVICE;
HAPTIC DEVICES;
HUMAN INTERFACES;
NANOFABRICATION;
NANOMETER SCALES;
OSCILLATING SURFACES;
QUARTZ CRYSTAL RESONATORS;
RESONANCE FREQUENCIES;
SAMPLE HOLDERS;
SAMPLE SURFACES;
SCRATCHING;
ULTRASONIC OSCILLATIONS;
HAPTIC INTERFACES;
|
|
EID: 55149125375
PISSN: 00214922
EISSN: 13474065
Source Type: Journal
DOI: 10.1143/JJAP.47.6181 Document Type: Article |
|
Times cited : (23)
|
|
References (14)
|
