Sub-20 nm scratch nanolithography for si using scanning probe microscopy

Japanese Journal of Applied Physics, Part 1: Regular Papers and Short Notes and Review Papers

Volumn 46, Issue 10 A, 2007, Pages 6908-6910

  Ogino, Takumi ^a   Nishimura, Shinya ^a   Shirakashi, Jun Ichi ^a  

^a TOKYO UNIVERSITY OF AGRICULTURE AND TECHNOLOGY   (Japan)

Author keywords

Diamond tip; Groove; Nanolithography; Scanning probe microscope; Scratch; Silicon

Indexed keywords

DIAMONDS; FABRICATION; SCANNING PROBE MICROSCOPY; SILICON COMPOUNDS; STRUCTURAL PROPERTIES;

DIAMOND TIPS; SCRATCH NANOLITHOGRAPHY; SIZE FLUCTUATIONS; STANDARD DEVIATIONS;

NANOLITHOGRAPHY;

DIAMOND; LITHOGRAPHY; SILICON COMPOUNDS;

EID: 35348923415     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.46.6908     Document Type: Article

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