Scratching on polystyrene thin film without bumps using atomic force microscopy

Journal of Vacuum Science and Technology B: Microelectronics and Nanometer Structures

Volumn 17, Issue 6, 1999, Pages 2452-2456

  Iwata, Futoshi ^a   Matsumoto, Tarou ^a   Ogawa, Ryuhei ^a   Sasaki, Akira ^a  

^a SHIZUOKA UNIVERSITY   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 0033267342     PISSN: 10711023     EISSN: None     Source Type: Journal    
DOI: 10.1116/1.591110     Document Type: Article

References (15)

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