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Physica Status Solidi (C) Current Topics in Solid State Physics

Volumn 5, Issue 6, 2008, Pages 1914-1916

AlGaN/GaN-based MEMS with two-dimensional electron gas for novel sensor applications

(8) Niebelschutz F a Cimalla, V a Tonisch, K a Haupt, Ch a Bruckner K a Stephan, R a Hein, M a Ambacher, O a

a ILMENAU UNIVERSITY OF TECHNOLOGY (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ALGAN/GAN; ALGAN/GAN HETEROSTRUCTURES; BEFORE AND AFTER; BIOLOGICAL SENSORS; ELECTRICAL MEASUREMENT; HIGH SENSITIVITY; MICROELECTROMECHANICAL RESONATORS; NANOLITERS; PH VALUE; PIEZO-ELECTRIC EFFECTS; PROCESS STEPS; SENSING SIGNALS; SENSOR APPLICATIONS; SENSOR STRUCTURES; SHEET CARRIER CONCENTRATION; SIC SUBSTRATES; SIMULTANEOUS MEASUREMENT; SURROUNDING ENVIRONMENT; TWO-DIMENSIONAL ELECTRON GAS (2DEG);

BIOLOGICAL MATERIALS; CARRIER CONCENTRATION; CHEMICAL STABILITY; ELECTRON GAS; ELECTRON MOBILITY; ELECTRONS; GALLIUM NITRIDE; PIEZOELECTRICITY; RESONATORS; SENSORS; SILICON CARBIDE; TWO DIMENSIONAL;

TWO DIMENSIONAL ELECTRON GAS;

EID: 55149125333 PISSN: 18626351 EISSN: 16101642 Source Type: Journal
DOI: 10.1002/pssc.200778424 Document Type: Conference Paper

Times cited : (18)

References (9)

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