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Volumn 47, Issue 9 PART 2, 2008, Pages 7490-7493
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Fabrication of (Ba0.6,Sr0.4)TiO3 thick films by aerosol deposition method for application to embedded multilayered capacitor structures
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Author keywords
Aerosol deposition; BST; Leakage current; Strain
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Indexed keywords
AEROSOLS;
ATMOSPHERIC AEROSOLS;
BARIUM;
BIOMECHANICS;
CAPACITANCE;
CAPACITORS;
DIELECTRIC DEVICES;
DIELECTRIC FILMS;
ELECTRIC EQUIPMENT;
ELECTRIC FIELDS;
ELECTRIC PROPERTIES;
ENERGY ABSORPTION;
FABRICATION;
LEAKAGE CURRENTS;
RESPIRATORY MECHANICS;
SILICON;
STAINLESS STEEL;
SUBSTRATES;
THICK FILMS;
COPPER;
ELECTRODEPOSITION;
AEROSOL DEPOSITION;
AEROSOL DEPOSITION METHODS;
AEROSOL DEPOSITIONS;
APPLIED ELECTRIC FIELDS;
AVERAGE GRAIN SIZES;
BST;
CAPACITOR STRUCTURES;
CU SUBSTRATES;
ELECTRICAL PROPERTIES;
METAL SUBSTRATES;
METALLIZATION;
MULTILAYERED;
SUBSTRATE SELECTIONS;
MULTI-LAYERED;
COPPER;
SUBSTRATES;
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EID: 55149123773
PISSN: 00214922
EISSN: 13474065
Source Type: Journal
DOI: 10.1143/JJAP.47.7490 Document Type: Article |
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Times cited : (6)
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References (15)
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