Numerical and experimental analysis of intermittent line-and-space patterns in thermal nanoimprint

Japanese Journal of Applied Physics

Volumn 47, Issue 6 PART 2, 2008, Pages 5145-5150

  Onishi, Yuki ^a   Hirai, Yoshihiko ^b   Takagi, Hideki ^c   Takahashi, Masaharu ^c   Tanabe, Toshiaki ^b   Maeda, Ryutaro ^c   Iriye, Yasuroh ^a  

^a MIZUHO INFORMATION AND RESEARCH INSTITUTE   (Japan)

^b Osaka Prefecture University   (Japan)

^c NATIONAL INSTITUTE OF ADVANCED INDUSTRIAL SCIENCE AND TECHNOLOGY AIST   (Japan)

Author keywords

Finite element method; Generalized Maxwell model; Line and space; Thermal nanoimprint; Viscoelastic body

Indexed keywords

ABS RESINS; COMPUTER SIMULATION; DEFORMATION; EXPERIMENTS; MAXWELL EQUATIONS; OLEFINS; POLYMERS; SEMICONDUCTING SILICON; VISCOELASTICITY;

CONTINUOUS; EXPERIMENTAL ANALYSES; FINITE ELEMENT NUMERICAL ANALYSES; GENERALIZED MAXWELL MODEL; GENERALIZED MAXWELL MODELS; HOLDING TIMES; LINE-AND-SPACE; MATERIAL PROPERTIES; NUMERICAL INVERSE ANALYSES; NUMERICAL SIMULATIONS; PATTERNING; POLYMER DEFORMATIONS; SPACE PATTERNS; TEMPERATURE DEPENDENTS; THERMAL NANOIMPRINT; VIBRATIONAL TESTS; VISCOELASTIC BODY; VISCOELASTIC MODELS; WILLIAMS;

FINITE ELEMENT METHOD;

EID: 55049120277     PISSN: 00214922     EISSN: 13474065     Source Type: Journal    
DOI: 10.1143/JJAP.47.5145     Document Type: Article

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