Multilayered ZnO films of improved quality deposited by magnetron sputtering

Acta Physica Polonica A

Volumn 114, Issue 5, 2008, Pages 1131-1137

  Ievtushenko, A ^a   Karpyna, V ^a   Lashkarev, G ^a   Lazorenko, V ^a   Baturin, V ^b   Karpenko, A ^b   Lunika, M ^b   Dan'ko, A ^c  

^a FRANTSEVICH INSTITUTE FOR PROBLEMS OF MATERIALS SCIENCE   (Ukraine)

^b INSTITUTE OF APPLIED PHYSICS   (Ukraine)

^c INSTITUTE FOR SINGLE CRYSTALS   (Ukraine)

Author keywords

[No Author keywords available]

Indexed keywords

MAGNETRON SPUTTERING; METALLIC FILMS; SAPPHIRE; SUBSTRATES; X RAY DIFFRACTION; ZINC OXIDE;

MULTI-LAYERED; RF-MAGNETRON SPUTTERING; SAPPHIRE SUBSTRATES; SINGLE LAYER; STRUCTURAL QUALITIES; X-RAY DIFFRACTION DATA; ZNO FILMS; ZNO THIN FILM;

THIN FILMS;

EID: 54949127201     PISSN: 05874246     EISSN: None     Source Type: Journal    
DOI: 10.12693/APhysPolA.114.1131     Document Type: Conference Paper

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