The influence of N2 flow rate and substrate temperature on Ti1-xAlxN thin films

Crystal Research and Technology

Volumn 43, Issue 7, 2008, Pages 709-712

  Albert Irudayaraj, A ^a   Kalainathan, S ^b  

^a SACRED HEART COLLEGE   (India)

^b VIT UNIVERSITY   (India)

Author keywords

DC magnetron sputtering; Nano crystalline; Thin film; Titanium aluminium nitride

Indexed keywords

ALUMINUM; ALUMINUM COMPOUNDS; FLOW RATE; FRICTION; GRAIN SIZE AND SHAPE; MAGNETRONS; NITRIDES; SEMICONDUCTING SILICON COMPOUNDS; SILICON; SUBSTRATES; SURFACE PROPERTIES; SURFACE ROUGHNESS; THICK FILMS; THIN FILMS; TITANIUM; TITANIUM NITRIDE; X RAY ANALYSIS;

ATOMIC FORCES; DC MAGNETRON SPUTTERING; DEPOSITED FILMS; GRAIN SIZES; NANO CRYSTALLINE; REACTIVE DC MAGNETRON SPUTTERING; SILICON (111) SUBSTRATE; SUBSTRATE TEMPERATURES; TITANIUM ALUMINIUM NITRIDE; TITANIUM ALUMINIUM NITRIDES; X-RAY DIFFRACTIONS;

MAGNETRON SPUTTERING;

EID: 54949113934     PISSN: 02321300     EISSN: 15214079     Source Type: Journal    
DOI: 10.1002/crat.200711122     Document Type: Article

References (14)

1. H. C. Barshilia, K. S. Rajam, A. Jain, K. Gopinadhan, and S. Chaudhary, Thin Solid Films 503, 158 (2006).
2. H. C. Barshilia and K. S. Rajam, J. Appl. Phys. 98, 014311 (2005).
3. H. Ohnuma, N. Nihira, A. Mitsuo, K. Toyoda, K. Kubota, and T. Aizawa, Surf. Coat. Technol. 177-178, 623 (2004).
4. K. D. Bouzakis, N. Vidakis, N. Michailidis, T. Leyendecker, G. Erkens, and G. Fuss, Surf. Coat. Technol. 120-121, 34 (1999).
5. K. Chu, P. W. Shum, and Y. G. Shen, Mater. Sci. Eng. B 131, 62 (2006).
6. V. Chakrabarti, J. J. Jeong, S. K. Hwang, Y. C. Yoo, and C. M. Lee, Thin Solid Films 406, 159 (2002).
7. Gwang Seok Kim, Sang Yul Lee, and Jun Hee Hahn, Surf. Coat. Technol. 193, 213 (2005).
8. F. C. Stedile, F. L. Freire Jr., W. H. Schreiner, and I. J. R. Baumvol, Vacuum 45, 441 (1994).
9. Da-Yung Wang, Yen-Way Li, Chi-long Chang, and Wei-Yu Ho, Surf. Coat. Technol. 114, 109 (1999).
10. J. P. Endle, Y. M. Sun, J. Silverman, N. Nguyen, A. H. Cowley, J. M. White, and J. G. Ekerdt, Thin Solid Films 385, 66 (2001).
11. Kwang Ho Kim and Sung H. Lee, J. Mater. Sci. Lett. 14, 1531 (1995).
12. C. Padmaprabhu, P. Kuppusami, E. Mohandas, and V. S. Raghunathan, Proceedings of International symposium on materials ageing and life management, October 3-6, 2000, IGCAR, Kalpakkam, India.
13. W. Kim and K. H. Kim, Thin Solid Films 307, 113 (1997).
14. Bor-Yuan Shew, Jow-Lay Huang, and Ding-Fwu Lii, Thin Solid Films 293, 212 (1997).