Step edge sputtering yield at grazing incidence ion bombardment

Physical Review Letters

Volumn 92, Issue 24, 2004, Pages

  Hansen, Henri ^a   Polop, Celia ^a   Michely, Thomas ^a   Friedrich, Andreas ^b   Urbassek, Herbert M ^b  

^a RWTH AACHEN UNIVERSITY   (Germany)

^b Rheinland Pfälzische Technische Universität Kaiserslautern Landau   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

GRAZING INCIDENCE; ISLAND COALESCENCE; STEP EDGE SPUTTERING; VACANCY ISLAND DENSITY;

COALESCENCE; EPITAXIAL GROWTH; KINETIC ENERGY; MATHEMATICAL MODELS; MOLECULAR DYNAMICS; NUCLEATION; QUENCHING; SCANNING TUNNELING MICROSCOPY; SPUTTERING;

ION BOMBARDMENT;

EID: 84862392272     PISSN: 00319007     EISSN: None     Source Type: Journal    
DOI: 10.1103/PhysRevLett.92.246106     Document Type: Article

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