An in situ sealing method for liquid-filled micro-cavities based on photoembossing

Journal of Micromechanics and Microengineering

Volumn 18, Issue 9, 2008, Pages

  Hermans, Ko ^a,b   Van Delden, Marc ^c   Bastiaansen, Cees W M ^a,b   Broer, Dirk J ^c  

^a DUTCH POLYMER INSTITUTE DPI   (Netherlands)

^b EINDHOVEN UNIVERSITY OF TECHNOLOGY   (Netherlands)

^c PHILIPS RESEARCH LABORATORIES   (Netherlands)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 54749102642     PISSN: 09601317     EISSN: 13616439     Source Type: Journal    
DOI: 10.1088/0960-1317/18/9/095022     Document Type: Article

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