Embedded LTPS flash cells with oxide-nitride-oxynitride stack structure for realization of multi-function mobile flat panel displays

Journal of Physics D: Applied Physics

Volumn 41, Issue 17, 2008, Pages

  Jung, Sungwook ^a   Kim, Jaehong ^a   Son, Hyukjoo ^a   Jang, Kyungsoo ^a   Cho, Jaehyun ^a   Kim, Kyunghae ^a   Choi, Byoungdeog ^a   Yi, Junsin ^a  

^a Sungkyunkwan University   (South Korea)

Author keywords

[No Author keywords available]

Indexed keywords

EID: 54749083453     PISSN: 00223727     EISSN: 13616463     Source Type: Journal    
DOI: 10.1088/0022-3727/41/17/172006     Document Type: Article

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