Optimal fabricate technology of polymer micro optical mirror

Proceedings of the IEEE International Conference on Industrial Technology

Volumn , Issue , 2008, Pages

  Hung, Kuo Yung ^a   Liao, Jung Chiang ^a   Tseng, Fan Gang ^b   Feng, H P ^a   Tsai, H H ^a  

^a MING CHI UNIVERSITY OF TECHNOLOGY   (Taiwan)

^b NATIONAL TSING HUA UNIVERSITY   (Taiwan)

Author keywords

Inclined exposure technology; Micro optical pickup head; Thickness film process.

Indexed keywords

ABS RESINS; DATA STORAGE EQUIPMENT; ELECTROMAGNETIC WAVES; FRICTION; LIGHT; MIRRORS; NANOFLUIDICS; OPTICAL DATA PROCESSING; OPTICAL PROPERTIES; PHOTORESISTORS; POLYMERS; REFRACTION; REFRACTIVE INDEX; SEMICONDUCTING SILICON COMPOUNDS; SILICON; SILICON WAFERS; SURFACE CHEMISTRY; SURFACE PROPERTIES; SURFACE ROUGHNESS; SURFACE TENSION; SURFACE TREATMENT; TECHNOLOGY;

ALIGNMENT ERRORS; ANGLE SELECTIVITIES; BATCH MANUFACTURING; BLUE LIGHT; INCLINED EXPOSURE TECHNOLOGY; INTEGRATION PROCESSES; INTERFEROMETER MEASUREMENTS; MANUAL ASSEMBLIES; MATCHING; MATCHING INDICES; MICRO OPTICAL PICKUP HEAD; MIRROR STRUCTURES; OPTICAL; OPTICAL MIRRORS; OPTICAL PICKUP HEADS; OPTICAL STORAGE SYSTEMS; OPTIMIZED PROCESSES; POLYMER MATERIALS; POLYMER PROCESSING; QUANTITATIVE; SPACE BETWEEN; THICK PHOTORESISTS; THICKNESS FILM PROCESS.;

SURFACES;

EID: 54549127459     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICIT.2008.4608330     Document Type: Conference Paper

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