Anisotropic etching of {100} and {110} planes in (100) silicon

Journal of Micromechanics and Microengineering

Volumn 11, Issue 3, 2001, Pages 217-220

  Powell, Oliver ^a   Barry Harrison, H ^a  

^a NONE

Author keywords

[No Author keywords available]

Indexed keywords

ALCOHOLS; ANISOTROPY; CRYSTAL ORIENTATION; SILICON; SURFACE PROPERTIES;

ANISOTROPIC ETCHING;

ETCHING;

EID: 0343773238     PISSN: 09601317     EISSN: None     Source Type: Journal    
DOI: 10.1088/0960-1317/11/3/309     Document Type: Article

References (15)

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