Photothermal three-dimensional fabrication of polymers using diode-pumped solid state lasers

Journal of Microlithography, Microfabrication and Microsystems

Volumn 3, Issue 3, 2004, Pages 472-477

  Chang, Won Seok ^a   Shin, Bo Sung ^a   Kim, Jaegu ^a   Whang, Kyung Hyun ^a  

^a Korea Institute of Machine and Materials   (South Korea)

Author keywords

Diode pumped; Laser sculpting technique; Photothermal ablation; Polymer; Solid state laser

Indexed keywords

LASER ABLATION; LIGHT SOURCES; MASKS; PHOTONS; SOLID STATE LASERS; TRIBOLOGY; ULTRAVIOLET RADIATION;

COPPER VAPOR LASERS; LASER SCULPTING TECHNIQUE; PHOTON BEAMS; PHOTOTHERMAL ABLATION;

POLYMERS;

EID: 5444271963     PISSN: 15371646     EISSN: None     Source Type: Journal    
DOI: 10.1117/1.1759589     Document Type: Conference Paper

References (16)

1. M. Mullenborn, H. Dirac, J. Petersen, and S. Bouwstra, "Fast three-dimensional laser micromachining of silicon for microsystems," Sens. Actuators, A 52, 121-125 (1996).
2. M. Rohde and A. Schussler, "On the response-tme behaviour of laser micromachined NiTi shape memory actuators," Sens. Actuators, A 61, 463-468 (1997).
3. T. A. Mai and N. T. Nguyen, "Fabrication of micropumps with Q-switched Nd:YAG lasers," 2nd Int. Symp. Laser Precision Microfab. LPM2001, pp. 195-202 (2001).
4. S. Dauer, A. Ehlert, and S. Büttgenbach, "Rapid prototyping of micromechanical devices using a Q-switched Nd:YAG laser with optional frequency doubling," Sens. Actuators, A 76, 381-385 (1999).
5. A. Slocombe and L. Li, "Laser ablation machining of metal/polymer composite materials," Appl. Surf. Sci. 154-155, 617-621 (2000).
6. P. E. Dyer, "Excimer laser polymer ablation: The first twenty years," Proc. SPIE 4760, 34-42 (2002).
7. R. Srinivasan and W. J. Leigh, "Ablative photodecomposition: action of far-ultraviolet (193 nm) laser radiation on poly (ethylene terephthalate) films," J. Am. Chem. Soc. 104, 6782-6784 (1982).
8. E. Sutcliffe and R. Srinivasan, "Dynamics of UV laser ablation of organic polymer surface," J. Appl. Phys. 60, 3315-3322 (1986).
9. L. B. Kiss and P. Simon, "Statistical model for the UV laser ablation mechanism of polymers," Solid State Commun. 65, 1253-1254 (1988).
10. J. H. Brannon and J. R. Lankard, "Pulsed CO2 laser etching of polymide," Appl. Phys. Lett. 48, 1226-1228 (1986).
11. 2 laser ablative etching of polyethylene terephthalate," Appl. Phys. B 48, 489-493 (1989).
12. S. Kuper, J. Brannon, and K. Brannon, "Threshold behavior in polyimide photoablation: single-shot rate measurements and surface-temperature modeling," Appl. Phys. A 56, 43-50 (1993).
13. J. E. Andrew, P. E. Dyer, D. Forster, and P. H. Key, "Direct etching of polymeric materials using a XeCl laser," Appl. Phys. Lett. 43, 717-719 (1983).
14. P. E. Dyer, Laser Ablation of Polymers, in Photochemical Processing of Electronic Materials, I. W. Boyd and R. B. Jackman, Eds., Academic Press, London (1992).
15. T. Lippert, L. S. Bennett, T. Nakamura, H. Niino, A. Ouchi, and A. Yabe, "Comparison of the transmission behavior of a triazeno-polymer with a theoretical model," Appl. Phys. A: Solids Surf. 63, 257-265 (1996).
16. T. Lippert, M. Hauer, C. R. Phipps, and A. J. Wlkaun, "Polymers designed for laser applications: fundamentals and applications," Proc. SPIE 4760, 63-71 (2002).