Design and fabrication of MEMS-based active sliders using double-layered composite PZT thin films in hard disk drives

Digest of the Asia-Pacific Magnetic Recording Conference 2002, APMRC 2002

Volumn , Issue , 2002, Pages

  Tagawa, N ^a   Kitamura, K I ^a   Mori, A ^a  

^a KANSAI UNIVERSITY   (Japan)

Author keywords

active sliders; HDI; MEMS; PZT thin films

Indexed keywords

COMPOSITE FILMS; FABRICATION; HARD DISK STORAGE; MAGNETIC RECORDING; MEMS; MICROACTUATORS; MICROELECTROMECHANICAL DEVICES; MICROMACHINING; SOL-GELS;

ACTIVE SLIDERS; DESIGN PROCEDURE; DOUBLE LAYERED; FLYING HEIGHTS; HARD DISK DRIVE; MICROMACHINING PROCESS; PIEZOELECTRIC CHARACTERISTICS; PZT THIN FILM;

THIN FILMS;

EID: 84964465105     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/APMRC.2002.1037653     Document Type: Conference Paper

References (1)

1. N. Tagawa, H. Seki, K. Kitamura, and A. Mori., "Development of novel PZT thin films for active sliders based on head load/unload on demand systems", Microsystem Technologies, Vol. 8, Issues2-3, p 133, 2002