Thermal mechanisms of laser micromaching of indium tin oxide

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 5339, Issue , 2004, Pages 313-320

  Willis, David A ^a  

^a Southern Methodist University   (United States)

Author keywords

Ablation; Flexible substrate; Indium tin oxide; Micromachining; Pulsed laser

Indexed keywords

FLEXIBLE STRUCTURE; GLASS SUBSTRATES; INDIUM TIN OXIDE; LASER WAVELENGTH;

EXCIMER LASERS; FRACTURE; LASER ABLATION; LASER PULSES; MECHANICAL PROPERTIES; MELTING; MICROMACHINING; OPTIMIZATION; POLYETHYLENE TEREPHTHALATES; TIN COMPOUNDS; VAPORIZATION;

INDIUM COMPOUNDS;

EID: 5444224177     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.529830     Document Type: Conference Paper

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