Laser patterning Indium Tin Oxide (ITO) coated on PET substrate

Proceedings of SPIE - The International Society for Optical Engineering

Volumn 4230, Issue , 2000, Pages 156-163

  Tsai, H Y ^a   Yang, H ^a   Pan, C T ^a   Chou, M C ^a  

^a INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE   (Taiwan)

Author keywords

Excimer laser ablation; ITO; PET substrate

Indexed keywords

ATOMIC FORCE MICROSCOPY; DUCTILITY; ETCHING; EVAPORATION; EXCIMER LASERS; FLAT PANEL DISPLAYS; GLASS; INDIUM PLATING; LASER ABLATION; MICROMACHINING; PHOTORESISTS; PLASTIC SHEETS; POLYETHYLENE TEREPHTHALATES; THERMAL EFFECTS; THIN FILMS; TRANSPARENCY;

CONVENTIONAL MACHINING METHOD;

CONDUCTIVE FILMS;

EID: 0034452624     PISSN: 0277786X     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1117/12.404897     Document Type: Conference Paper

References (15)

1. Physics of very thin ITO conducting films with high transparency prepared by DC magnetron sputtering
2. Application design, and fabrication of ITO films on PET substrate
3. Applications of lasers in microelectronics and micromechanics
4. The application of laser process technology to thin film packaging
5. Combination of excimer laser micromachining and replication processes suited for large scale production
6. Application of excimer laser on ophthalmology
7. Excimer laser ablation of polyimide-doped poly(tetrafluoreothylene) at 248 and 308 nm
8. Ablation of poly(methylmethacrylate) and poly(2-hydroxyethyl methacrylate) by 308, 222, and 193 nm excimer-laser radiation
9. KrF-laser ablation of polyurethane
10. The effect of pulse repitition rate on laser ablation of polyimide and polymethylmethacrylate based polymers