Preparation of thin ferrite films on silicon using RF sputtering

Physica Status Solidi (A) Applications and Materials Science

Volumn 205, Issue 8, 2008, Pages 1783-1786

  Koblischka, M R ^a   Kirsch, M ^a   Brust, M ^a   Koblischka Veneva, A ^a   Hartmann, U ^a  

^a SAARLAND UNIVERSITY   (Germany)

Author keywords

[No Author keywords available]

Indexed keywords

ADDITIONAL ANNEALING; FERRITE FILMS; MAGNETIC FORCES; POLYCRYSTALLINE; RF-SPUTTERING; SI SURFACES; SI(100); SOFT MAGNETIC FILMS; THIN-FILMS;

ANNEALING; FERRITE; FILM PREPARATION; IRON COMPOUNDS; MAGNETIC FORCE MICROSCOPY; MAGNETIC MATERIALS; MICROSCOPIC EXAMINATION; NICKEL ALLOYS; ZINC;

SILICON;

EID: 54249163647     PISSN: 18626300     EISSN: 18626319     Source Type: Journal    
DOI: 10.1002/pssa.200723608     Document Type: Conference Paper

References (10)

1. S. Krupicka, Physik der Ferrite und der verwandten magnetischen Oxide (Vieweg & Sohn, Braunschweig, 1973).
2. N. Matsushita, C. P. Chong, T. Mizutani, and M. Abe, J. Appl. Phys. 91, 7376 (2002).
3. M. Abe and Y. Tanaka, IEEE Trans. Magn. 40, 1708 (2004).
4. M. R. Koblischka, J. D. Wei, T. Sulzbach, A. D. Johnston, and U. Hartmann, IEEE Trans. Magn. 43, 2205 (2007).
5. M. Kirsch, M. R. Koblischka, J. D. Wei, and U. Hartmann, J. Vac. Sci. B 25, 1679 (2007).
6. Datasheet Pointprobe cantilevers, Nanoworld Services GmbH, Erlangen, Germany.
7. S. Bals, W. Tirry, R. Guerts, Z. Q. Yang, and D. Schryvers, Microsc. Microanal. 13, 80 (2007).
8. M. R. Koblischka, J. D. Wei, M. Kirsch, and U. Hartmann, Jpn. J. Appl. Phys. 45, 2238 (2006).
9. M. R. Koblischka, M. Kirsch, J. Wei, and U. Hartmann, J. Magn. Magn. Mater. 316, e666 (2007).
10. M. R. Koblischka, J. D. Wei, M. Kirsch, M. Lessel, R. Pfeifer, M. Brust, U. Hartmann, C. Richter, and T. Sulzbach, J. Phys., Conf. Ser. 61, 596 (2007).