Effect of microwave frequency on breakdown and electron energy distribution function using a global model

Applied Physics Letters

Volumn 93, Issue 15, 2008, Pages

  Nam, Sang Ki ^a   Verboncoeur, John P ^a  

^a Etcheverry Hall MCI 730   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

ATMOSPHERICS; DISSOCIATION; DISTRIBUTION FUNCTIONS; ELECTRIC DISCHARGES; ELECTRIC POWER DISTRIBUTION; ELECTRON ENERGY LEVELS; GRANULAR MATERIALS; ION BEAMS; MICROWAVE DEVICES; MICROWAVES; PLASMA DEVICES; PLASMAS; PROBABILITY DENSITY FUNCTION; RATE CONSTANTS; REACTION RATES;

ELECTRON ENERGY DISTRIBUTION FUNCTIONS; FREQUENCY EFFECTS; GLOBAL MODELS; HIGH POWER MICROWAVES; MODELING; MODELING TOOLS; PLASMA PARAMETERS; PLASMA PROCESSING; REACTION RATE COEFFICIENTS;

ELECTRON ENERGY ANALYZERS;

EID: 54149099027     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.3003879     Document Type: Article

References (18)

1. S. K. Nam and J. P. Verboncoeur, Appl. Phys. Lett. 92, 231502 (2008).
2. C. Lee, D. B. Graves, M. A. Liebermann, and D. W. Hess, J. Electrochem. Soc. 141, 1546 (1994).
3. S. Panda and D. J. Economou, J. Appl. Phys. 87, 8323 (2000).
4. J. T. Gudmundsson, Plasma Sources Sci. Technol. 10, 76 (2001).
5. M. Lee and C. Chung, Phys. Plasmas 12, 073501 (2005).
6. J. P. Verboncoeur, H. C. Kim, Y. Wang, and Y. Y. Lau, 34th IEEE ICOPS, Albuquerque, NM, 2007 (unpublished).
7. T. Kimura and K. Ohe, J. Appl. Phys. 89, 4240 (2001).
8. L. R. Peterson and J. E. Allen, J. Chem. Phys. 56, 6068 (1972).
9. Y. Ikeda, K. Suzuki, H. Fukumoto, J. P. Verboncoeur, P. J. Christenson, C. K. Birdsall, M. Shibata, and M. Ishigaki, J. Appl. Phys. 88, 6216 (2000).
10. V. Vahedi and M. Surendra, Comput. Phys. Commun. 87, 179 (1995).
11. The Siglo Data Base, CPAT and KINEMA software, http://www.csn.net/siglo, 1998.
12. L. Gould and L. W. Roberts, J. Appl. Phys. 27, 1162 (1956).
13. Y. Y. Lau, J. P. Verboncoeur, and H. C. Kim, Appl. Phys. Lett. 89, 261501 (2006).
14. J. T. Krile, A. A. Neuber, and H. G. Krompholz, Appl. Phys. Lett. 89, 201501 (2006).
15. A. A. Neuber, J. T. Krile, G. F. Edmiston, and H. G. Krompholz, Phys. Plasmas 14, 057102 (2007).
16. K. C. Byron and G. J. Pert, J. Phys. D: Appl. Phys. 12, 401 (1979).
17. Y. E. E.-D. Gamal, M. S. Shafik, and M. M. Khalil, J. Phys. D: Appl. Phys. 26, 1933 (1993).
18. I. P. Shkarofsky, T. W. Johnston, and M. P. Bachynski, The Particle Kinetics of Plasmas (Addison-Wesley, Reading, MA, 1966).