Complex permittivity characterization of benzocyclobutene for terahertz applications

Microelectronic Engineering

Volumn 85, Issue 11, 2008, Pages 2276-2281

  Perret, Etienne ^a   Zerounian, Nicolas ^a   David, Sylvain ^a   Aniel, Frédéric ^a  

^a UNIVERSITÉ PARIS SACLAY   (France)

Author keywords

Benzocyclobutene polymer (BCB); Dielectric loss; Dielectric permittivity; Fourier transform spectroscopy; Terahertz

Indexed keywords

ABS RESINS; BUTENES; FOURIER TRANSFORMS; GALLIUM ALLOYS; GALLIUM NITRIDE; INTEGRATED CIRCUITS; POLYMERS; RESINS; SEMICONDUCTING GALLIUM; SILICON;

BENZOCYCLOBUTENE POLYMER (BCB); DIELECTRIC LOSS; DIELECTRIC PERMITTIVITY; FOURIER TRANSFORM SPECTROSCOPY; TERAHERTZ;

PERMITTIVITY;

EID: 53849114634     PISSN: 01679317     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.mee.2008.07.008     Document Type: Article

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