Influence of reaction with XeF2 on surface adhesion of Al and Al2O3 surfaces

Applied Physics Letters

Volumn 93, Issue 14, 2008, Pages

  Zhang, Tianfu ^c   Park, Jeong Y ^c   Huang, Wenyu ^c   Somorjai, Gabor A ^a,b  

^a UNIVERSITY OF CALIFORNIA   (United States)

^b LAWRENCE BERKELEY NATIONAL LABORATORY   (United States)

^c NONE

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL REACTIONS; FLUORINE;

SURFACE ADHESION;

SURFACE REACTIONS;

EID: 53649092992     PISSN: 00036951     EISSN: None     Source Type: Journal    
DOI: 10.1063/1.2992632     Document Type: Article

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