Surface morphology and composition of films grown by size-selected Cu nanoclusters

Vacuum

Volumn 83, Issue 4, 2008, Pages 719-723

  Majumdar, Abhijit ^a   Ganeva, Marina ^a   Köpp, Daniel ^a   Datta, Debasish ^b   Mishra, Puneet ^b   Bhattacharayya, Satyaranjan ^b   Ghose, Debabrata ^b   Hippler, Rainer ^a  

^a UNIVERSITY OF GREIFSWALD   (Germany)

^b SAHA INSTITUTE OF NUCLEAR PHYSICS   (India)

Author keywords

Cu nanocluster films; Si substrates; X ray photoelectron spectroscopy

Indexed keywords

AGGLOMERATION; ATOMIC FORCE MICROSCOPY; CHLORINE COMPOUNDS; COPPER ALLOYS; EPITAXIAL GROWTH; IMAGING TECHNIQUES; MAGNETRON SPUTTERING; MICROSCOPIC EXAMINATION; MOLECULAR ORBITALS; MOLECULAR SPECTROSCOPY; NANOCLUSTERS; NANOSTRUCTURED MATERIALS; NANOSTRUCTURES; PHOTOELECTRON SPECTROSCOPY; SCANNING PROBE MICROSCOPY; SILICON; SPUTTER DEPOSITION; SUBSTRATES; X RAY PHOTOELECTRON SPECTROSCOPY;

CU NANOCLUSTER FILMS; ENERGY DISPERSIVE X RAYS; ISOLATED ISLANDS; MASS-FILTERED; MORPHOLOGICAL CHANGES; MORPHOLOGY AND COMPOSITION; NANOCLUSTER FILMS; ROOM TEMPERATURES; SCANNING ELECTRON MICROSCOPY (SEM); SI SUBSTRATES; STRUCTURAL INFORMATIONS; X-RAY PHOTOELECTRON SPECTROSCOPY XPS;

COPPER;

EID: 52949136269     PISSN: 0042207X     EISSN: None     Source Type: Journal    
DOI: 10.1016/j.vacuum.2008.05.022     Document Type: Article

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