Fabrication of micro temperature sensor on the flexible substrate

2007 7th IEEE International Conference on Nanotechnology - IEEE-NANO 2007, Proceedings

Volumn , Issue , 2007, Pages 1050-1053

  Lee, Chi Yuan ^a   Lee, Shuo Jen ^a   Wu, Guan Wei ^a  

^a YUAN ZE UNIVERSITY   (Taiwan)

Author keywords

Flexible sensor; MEMS; Parylene based; RIE

Indexed keywords

ACETONE; CHEMICAL SENSORS; CHROMIUM; CONDUCTIVE FILMS; FABRICATION; LITHOGRAPHY; MOLECULAR BEAM EPITAXY; NANOTECHNOLOGY; NONMETALS; OPTICAL DESIGN; REACTIVE ION ETCHING; SENSOR ARRAYS; SENSORS; SILICON; SILICON WAFERS; SOLIDS; TECHNOLOGY; TEMPERATURE SENSORS; THICK FILMS; THIN FILM DEVICES; THIN FILMS; VAPOR DEPOSITION;

ADHESION LAYERS; CURVED SURFACES; FABRICATION PROCESSES; FLEXIBLE SENSOR; FLEXIBLE SUBSTRATES; HIGHLY SENSITIVE; INTERNATIONAL CONFERENCES; MEMS; MICRO SENSORS; MICRO TEMPERATURE SENSORS; MICRO-ELECTRO MECHANICAL SYSTEMS; PARYLENE; PARYLENE-BASED; RIE; SILICON SUBSTRATES; TEMPERATURE SENSOR ARRAYS; THIN-FILM SENSORS;

GOLD;

EID: 52949095773     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/NANO.2007.4601363     Document Type: Conference Paper

References (10)

1. A. Mahmood, D. P. Butler, and Z. Celik-Butler, "Micromachined bolometers on polyimide," Sensors and Actuators A (2006).
2. S. H. Kim, J. Engel, C. Liu, and D. L. Jones, "Texture classification using a polymer-based MEMS tactile sensor," J. Micromechanics and Microengineering (2005).
3. P. G. Su and C. S. Wang, "Novel flexible resistive-type humidity sensor," Sensors and Actuators B (2006).
4. D. J. Lichtenwalner, A. E. Hydrick, and A. I. Kingon, "Flexible thin film temperature and strain sensor array utilizing a novel sensing concept," Sensors and Actuators A (2006).
5. J.G. Lee, Y.G. Seol, and N. E. Lee, "Polymer thin film transistor with electroplated source and drain electrodes on a flexible substrate," Thin Solid Films (2006).
6. D. Feili, M. Schuettler, T. Doerge, S. Kammera, and T. Stieglitz, "Encapsulation of organic field effect transistors for flexible biomedical microimplants," Sensors and Actuators A (2005).
7. D. Ziegler, T. Suzuki, and S. Takeuchi, "Fabrication of flexible neural probes with built-in microfluidic channels by thermal bonding of Parylene," J. Microelectromechanical Systems (2006).
8. L. J. Yang, H. H. Wang, J. M. Wang, K. C. Liu and K. C. Ko, "Buckled-type valves integrated by parylene micro-tubes," Sensors and Actuators A (2006).
9. H. S. Noha, Y. Huangb, and P. J. Hesketha, "Parylene micromolding, a rapid and low-cost fabrication method for parylene microchannel," Sensors and Actuators B (2004).
10. Z. Fan, J. M. Engel, J. Chen, and C. Liu, "Parylene Surface-Micromachined Membranes for Sensor Applications," J. Microelectromechniacl Systems (2004).