Combined analysis with WDS/EDS spectrometers in SEM

EPJ Applied Physics

Volumn 44, Issue 1, 2008, Pages 37-42

  Briant, M ^a,b,c   Balloy, D ^d  

^a Elexience   (France)

^b CNRS UMR 3299   (France)

^c Centre National de la Recherche Scientifique   (France)

^d ECOLE CENTRALE DE LILLE   (France)

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRON BEAM LITHOGRAPHY; EXPLOSIVE ACTUATED DEVICES; NONMETALS; SCANNING ELECTRON MICROSCOPY; SECONDARY EMISSION; SILICON; SPECTROMETERS;

BEAM CURRENTS; COMBINED ANALYSIS; COMBINED SYSTEMS; ELECTRON PROBE MICRO-ANALYZER; ENERGY DISPERSIVE SPECTROMETERS; LOW-MASS; OPTIMUM PARAMETERS; QUANTITATIVE ANALYSIS; SCANNING ELECTRON MICROSCOPE; SPATIAL RESOLUTION SR); WAVELENGTH DISPERSIVE;

SPECTROMETRY;

EID: 52649102024     PISSN: 12860042     EISSN: 12860050     Source Type: Journal    
DOI: 10.1051/epjap:2008146     Document Type: Conference Paper

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