Force sensor using carbon nanotubes directly synthesized on micro structure

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2007, Pages 827-830

  Takei, Y ^a   Matsumoto, K ^a   Shimoyama, I ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; ELECTRIC RESISTANCE; MEMS; MICROSTRUCTURE; PRESTRESSED BEAMS AND GIRDERS; SILICON WAFERS; SILICONES;

BEAM STRUCTURES; CHEMICAL VAPOR DEPOSITIONS (CVD); ELECTRICAL RESISTANCE CHANGE; ELECTRICAL RESISTANCES; FORCE SENSOR; PREPOLYMERS; SENSING ELEMENTS; SILICON LAYER;

CARBON NANOTUBES;

EID: 52249107493     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.2007.4433003     Document Type: Conference Paper

References (8)

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