Density control of carbon nanotubes using ethanol vapor flow

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn 2006, Issue , 2006, Pages 914-917

  Takei, Y ^a   Hoshino, K ^a   Matsumoto, K ^a   Shimoyama, I ^a  

^a UNIVERSITY OF TOKYO   (Japan)

Author keywords

[No Author keywords available]

Indexed keywords

CHEMICAL VAPOR DEPOSITION; DENSITY CONTROL (SPECIFIC GRAVITY); ETHANOL; SCANNING ELECTRON MICROSCOPY; SILICON WAFERS; VAPORS;

ETHANOL VAPOR FLOW; FLOW CHANNELS; HOLE BRIDGING;

CARBON NANOTUBES;

EID: 33750099148     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: None     Document Type: Conference Paper

References (6)

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