Conductometric sensors based on INGAAS/GAAS nanocoils

Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)

Volumn , Issue , 2007, Pages 847-850

  Bell, Dominik J ^a   Rüst, Philipp ^a   Dong, Lixin ^a   Schön, Silke ^a   Nelson, Bradley J ^a  

^a ETH ZURICH   (Switzerland)

Author keywords

[No Author keywords available]

Indexed keywords

GALLIUM COMPOUNDS; SEMICONDUCTING INDIUM; SEMICONDUCTING INDIUM GALLIUM ARSENIDE;

CONDUCTOMETRIC SENSOR; DESIGN FEATURES; HELICAL NANOSTRUCTURES; HIGH SURFACE-TO-VOLUME RATIO; MICRO-FABRICATION TECHNIQUES; PHOTOCONDUCTIVE DETECTORS; SENSOR PERFORMANCE; THREE-DIMENSIONAL STRUCTURE;

MEMS;

EID: 52249100111     PISSN: 10846999     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/memsys.2007.4433178     Document Type: Conference Paper

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