Silicon oxynitride based photonics

Proceedings of 2008 10th Anniversary International Conference on Transparent Optical Networks, ICTON

Volumn 3, Issue , 2008, Pages 266-269

  Wörhoff, Kerstin ^a   Klein, Edwin ^a   Hussein, Gamar ^a   Driessen, Alfred ^a  

^a UNIVERSITY OF TWENTE   (Netherlands)

Author keywords

Annealing; Chemical vapor deposition; Hydrogen reduction; Integrated optical devices; Silicon nitride; Silicon oxynitride

Indexed keywords

HYDROGEN; INTEGRATED CIRCUITS; INTEGRATED OPTICS; NITRIDES; NONMETALS; OPTICAL PROPERTIES; PHOTONICS; REFRACTIVE INDEX; SEMICONDUCTING CADMIUM TELLURIDE; SILICON;

ANNEALING; APPLICATION EXAMPLES; CHEMICAL VAPOR DEPOSITION; HYDROGEN INCORPORATION; HYDROGEN REDUCTION; INTEGRATED OPTICAL DEVICES; INTERNATIONAL CONFERENCES; MATERIAL COMPOSITIONS; NOVEL PROCESSES; REFRACTIVE INDICES; SILICON NITRIDE; SILICON OXYNITRIDE; TRANSPARENT OPTICAL NETWORKS;

OPTICAL MATERIALS;

EID: 52149103763     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/ICTON.2008.4598706     Document Type: Conference Paper

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