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Volumn , Issue , 2008, Pages

Effect of Refractive Solid Immersion Lens parameters on the enhancement of laser induced fault localization techniques

Author keywords

[No Author keywords available]

Indexed keywords

ELECTRONICS INDUSTRY; FAILURE ANALYSIS; INTEGRATED CIRCUITS; LASERS; LENSES; OPTICAL DATA STORAGE; OPTICAL INSTRUMENTS; OPTICAL WAVEGUIDES; QUALITY ASSURANCE; RELIABILITY; SAFETY FACTOR; TECHNICAL PRESENTATIONS;

EID: 51949107507     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/IPFA.2008.4588146     Document Type: Conference Paper
Times cited : (7)

References (11)
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    • Aw SE, Tan HS, Ong CK, "Optical Adsorption Measurements of Band-gap Shrinkage in Moderately and Heavily Doped Silicon", J Phys: Condens Matter, Vol 3, No 42, pg 8213-8223, 1991.
    • (1991) J Phys: Condens Matter , vol.3 , Issue.42 , pp. 8213-8223
    • Aw, S.E.1    Tan, H.S.2    Ong, C.K.3
  • 3
    • 0001735451 scopus 로고
    • Solid Immersion Microscope
    • Mansfield SM, Kino GS, "Solid Immersion Microscope", Appl Phys Lett, Vol 57, No 24, pg 2615-2616, 1990.
    • (1990) Appl Phys Lett , vol.57 , Issue.24 , pp. 2615-2616
    • Mansfield, S.M.1    Kino, G.S.2
  • 4
    • 1542330661 scopus 로고    scopus 로고
    • Liquid Immersion Objective for High-Resolution Optical Probing of Advanced Microprocessors
    • Nov 01, Santa Clara, California, USA
    • Eiles T, Pardy P, "Liquid Immersion Objective for High-Resolution Optical Probing of Advanced Microprocessors", Proc Int Symp Testing & Failure Analysis (ISTFA 2001), 11-15 Nov 01, Santa Clara, California, USA, pg 167-170, 2001.
    • (2001) Proc Int Symp Testing & Failure Analysis (ISTFA 2001), 11-15 , pp. 167-170
    • Eiles, T.1    Pardy, P.2
  • 6
    • 20444498219 scopus 로고    scopus 로고
    • Ippolito SB, Goldberg BB, Uenlue MS, Theoretical Analysis of Numerical Aperture Increasing Lens Microscopy, J Appl Phys, 97, 053105-1-12, 2005.
    • Ippolito SB, Goldberg BB, Uenlue MS, "Theoretical Analysis of Numerical Aperture Increasing Lens Microscopy", J Appl Phys, Vol 97, pg 053105-1-12, 2005.
  • 8
    • 0017538304 scopus 로고
    • Optical Constants of Various Heavily Doped pand n-type Silicon Crystals Obtained by Kramers-Krong Analysis
    • Barta E, "Optical Constants of Various Heavily Doped pand n-type Silicon Crystals Obtained by Kramers-Krong Analysis", Infrared Physics, Vol 17, pg 319-329, 1977.
    • (1977) Infrared Physics , vol.17 , pp. 319-329
    • Barta, E.1
  • 9
    • 0035948103 scopus 로고    scopus 로고
    • High spatial resolution subsurface microscopy
    • Ippolito SB, Goldberg BB, Ünlü MS, "High spatial resolution subsurface microscopy", Appl Phys Lett, Vol 78, No 26, pg 4071-4073, 2001.
    • (2001) Appl Phys Lett , vol.78 , Issue.26 , pp. 4071-4073
    • Ippolito, S.B.1    Goldberg, B.B.2    Ünlü, M.S.3
  • 10
    • 51949089640 scopus 로고    scopus 로고
    • Mitutoyo Corporation, Microscope Units, Objectives, Eyepieces and Accessories, Catalog No E4191-378
    • Mitutoyo Corporation, "Microscope Units, Objectives, Eyepieces and Accessories", Catalog No E4191-378
  • 11
    • 14844294322 scopus 로고    scopus 로고
    • High Resolution Backside Fault Isolation Technique Using Directly Forming Si Substrate into Solid Immersion Lens
    • 30 Mar 03-4 Apr 03, Dallas, Texas, USA
    • Koyama T, Yoshida E, Komori J, Mashiko Y, Nakasuji T, Katoh H, "High Resolution Backside Fault Isolation Technique Using Directly Forming Si Substrate into Solid Immersion Lens", Proc Int Rel Phys Symp (IRPS 2003), 30 Mar 03-4 Apr 03, Dallas, Texas, USA, pg 529-535, 2003.
    • (2003) Proc Int Rel Phys Symp (IRPS , pp. 529-535
    • Koyama, T.1    Yoshida, E.2    Komori, J.3    Mashiko, Y.4    Nakasuji, T.5    Katoh, H.6


* 이 정보는 Elsevier사의 SCOPUS DB에서 KISTI가 분석하여 추출한 것입니다.