A low-cost CMOS compatible serpentine-structured polysilicon-based microbolometer array

TRANSDUCERS 2003 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems, Digest of Technical Papers

Volumn 1, Issue , 2003, Pages 320-323

  Socher, E ^a   Sinai, Y ^a   Nemirovsky, Y ^a  

^a TECHNION ISRAEL INSTITUTE OF TECHNOLOGY   (Israel)

Author keywords

Bolometers; Circuits; CMOS process; Dielectrics; Fabrication; Resistors; Sensor arrays; Silicon; Thermal resistance; Thermal sensors

Indexed keywords

ACTUATORS; BOLOMETERS; CMOS INTEGRATED CIRCUITS; DIELECTRIC MATERIALS; FABRICATION; HEAT RESISTANCE; INFRARED DETECTORS; INTEGRATED CIRCUIT DESIGN; MICROSYSTEMS; NETWORKS (CIRCUITS); RESISTORS; SENSOR ARRAYS; SERPENTINE; SILICATE MINERALS; SILICON; TEMPERATURE SENSORS; TRANSDUCERS;

CMOS PROCESSS; DESIGN AND SIMULATION; DIFFERENTIAL CURRENT; FABRICATED DEVICE; MICROBOLOMETER ARRAYS; NONUNIFORMITY CORRECTION; STANDARD CMOS PROCESS; THERMAL SENSORS;

SOLID-STATE SENSORS;

EID: 51849125996     PISSN: None     EISSN: None     Source Type: Conference Proceeding    
DOI: 10.1109/SENSOR.2003.1215317     Document Type: Conference Paper

References (5)

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2. y on silicon micromachined structures", JMEMS Vol. 11 (2002), pp. 322-329.
3. D. Sabuncuoglu Tezcan, S. Eminoglu, O. Sevket Akar, and T. Akin, "A low cost uncooled infrared microbolometer focal plane array using the CMOS n-well layer", MEMS'01, pp. 566-569.
4. E. Socher, O. Bochobza-Degani and Y. Nemirovsky, "A novel spiral CMOS compatible micromachined thermoelectric microsensor", J. Micromech. Microeng. 11 (2001) 574-576.
5. MOSIS (Metal Oxide Semiconductor Implementation Service) - a multi project fabrication service run by ARPA (Advanced Research Projects Agency): http://www.mosis.edu