Microstripline applicators for creating microplasma discharges with microwave energy

Plasma Sources Science and Technology

Volumn 17, Issue 3, 2008, Pages

  Narendra, J J ^a   Grotjohn, T A ^a,b   Asmussen, J ^a,b  

^a Michigan State University   (United States)

^b Fraunhofer USA Inc   (United States)

Author keywords

[No Author keywords available]

Indexed keywords

DISCHARGE (FLUID MECHANICS); FLUID MECHANICS; MICROWAVES; PLASMA DEVICES; PLASMA DIAGNOSTICS; PLASMAS;

DISCHARGE POWERS; DISCHARGE PRESSURES; EXPERIMENTAL INVESTIGATIONS; INPUT PARAMETERS; INPUT POWERS; MICRO PLASMAS; MICRO-STRIP LINES; MICROWAVE ENERGIES; MICROWAVE PLASMA SYSTEMS; MICROWAVE POWERS; POWER DENSITIES; PRESSURE VARIATIONS;

ELECTRIC DISCHARGES;

EID: 51849094803     PISSN: 09630252     EISSN: 13616595     Source Type: Journal    
DOI: 10.1088/0963-0252/17/3/035027     Document Type: Article

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